Theory, Fabrication, And Experimentation Of Phononic Crystals In Mems At Micro/Nano Scale: Engineering Of Thermal And Rf Phonons To Applications In Thermoelectrics And Microresonators
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Book Details :
Theory, Fabrication, And Experimentation Of Phononic Crystals In Mems At Micro/Nano Scale: Engineering Of Thermal And Rf Phonons To Applications In Thermoelectrics And Microresonators